Surface Acoustic Wave Driven Microchannel Flow

We demonstrate that the propagation of surface acoustic waves, arising from the excitation of the acoustic field on a piezoelectric crystal (lithium niobate) substrate, along the sidewalls of microchannels (50 μm or 280 μm wide and 200 μm deep) fabricated in the substrate, can give rise to throughflow with velocities of the order 10 mm/s. This streaming flow in the direction along which the surface acoustic wave propagates is a result of the leakage of acoustic radiation from the substrate walls into the fluid. Good agreement is obtained between these preliminary experimental results with those from numerical simulations of the classical acoustic streaming model. In any case, these results show the potential of surface acoustic wave micropumps to be an effective fluid-driving mechanism for microfluidic devices.